Planar magnetron sputtering device

In a planar magnetron sputtering device including a cathode of target material having a planar sputtering surface, at least a portion of which is disposed about a center line perpendicular to said surface, an anode adapted for establishing an accelerating electric field between said anode and cathode, and magnetic means for establishing a magnetic field adjacent the planar sputtering surface of said cathode for lengthening the path traveled by electrons removed from said cathode, and wherein the lines of force of the magnetic field extend over the sputtering surface of said cathode and pass through the cathode in the vicinity of said center line,

• the improvement where said magnetic means includes a first plurality of horizontally disposed strips of magnetized tape disposed on the side of said cathode opposite said planar sputtering surface where each strip is in substantial contact with and at least partially overlaps at least one of the strips adjacent it so that a first magnetic structure is formed by said first plurality of strips, the direction of the flux through said horizontally disposed strips being substantially perpendicular to the approximate periphery of the sputtering surface of the cathode to thereby cause said magnetic lines of force to be perpendicular to said cathode at the approximate periphery thereof.

In a planar magnetron sputtering device including a cathode of target material having a planar sputtering surface, at least a portion of which is disposed about a center line perpendicular to said surface, an anode adapted for establishing an accelerating electric field between said anode and cathode, and magnetic means for establishing a magnetic field adjacent the planar sputtering surface of said cathode for lengthening the path traveled by electrons removed from said cathode, and wherein the lines of force of the magnetic field extend over the sputtering surface of said cathode and pass through the cathode in the vicinity of said center line,

• the improvement where said magnetic means includes first and second magnets separated from one another and connnected by at least one pole piece, said first magnet being approximately disposed along said center line, the width of said first and second magnets being substantially greater at the respective base portions thereof connected to said pole piece than the respective upper portions thereof adjacent said cathode.