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US 4,176,209 AGranted
Process for forming polymeric paraxylylene coatings and films possessing improved oxidation resistance
AssigneeRaytheon Company
InventorsThomas E. Baker, George L. Fix, John S. Judge
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Abstract
Polymeric paraxylylene coatings and films possessing significantly improved oxidation resistance, particularly at elevated temperatures, are disclosed as well as a process for their preparation wherein certain antioxidants are vaporized and codeposited with vaporous poly(paraxylylene) precursors onto a substrate.
Claims10
In a chemical vapor deposition process for forming polymeric paraxylylene including the steps of producing vaporous polymeric paraxylylene precursor and subsequently condensing said precursor;
- the improvement comprising condensing vaporized antioxidant simultaneously with said precursor, said antioxidant being a vaporizable and vapor-transportable material, to thereby incorporate said antioxidant into the polymeric paraxylylene formed.
Dependencies are inferred from the claim text.