Deposition rate regulation by computer control of sputtering systems
AssigneeVarian Associates, Inc.
InventorFrederick T. Turner
Life of this patent
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Abstract
A sputtering system utilizes a computer to monitor the power dissipation in the sputtering source and to accumulate the history of usage of the particular sputtering target. Desired deposition rate information is input to the computer, which establishes and maintains the desired rate and controls the plasma discharge to compensate for aging and deterioration of the target. End of useful target life is determined by the computer from objective criteria to trigger appropriate actions.
Claims7
In a sputtering system comprising
- a cathode and an anode spaced from said cathode,
- controllable excitation means for supporting a plasma discharge between said cathode and said anode,
- means for monitoring the power dissipated in said discharge,
- means for monitoring the duration of operation for said cathode, and
- computation means for continuously correcting said excitation means in response to a function of said duration and said power for maintaining the deposition rate of material at a selected value.
In a sputtering apparatus having a cathode and an anode in a hermetically sealed enclosure and means for maintaining a discharge between cathode and anode, the method of maintaining the sputtering deposition rate of such apparatus at a related value comprising the steps of,
- introducing a selected gas into the enclosure to a desired pressure,
- maintaining a plasma discharge between anode and cathode,
- logging the cumulative usage time during which said cathode is subject to discharge,
- sensing the parameters of said discharge, said parameters comprising the current drawn from said cathode and the potential difference between said cathode and anode,
- computing the power dissipated in said discharge,
- correcting a parameter of said discharge in accord with a function relating deposition rate, cumulative usage time, and said power, whereby said deposition rate is compensated for deterioration of the cathode.
Dependencies are inferred from the claim text.