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US 4,166,574 AGranted
Apparatus for marking identification symbols on wafer
AssigneeTokyo Shibaura Electric Co., Ltd.
InventorMasanori Yokoyama
Life of this patent
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Abstract
An apparatus for marking identification symbols on a wafer including: a marking means for marking identification symbols on the wafer; a reading means for reading the marked identification symbols; a comparing means for comparing data of the identification symbols which are read by the reading means with basic data on which the identification symbols are marked on the wafer, and a judging means for inspecting and judging from a result of the comparison whether the desired identification symbols are marked on the wafer or not.
Claims7
An apparatus for marking identification symbols on a wafer surface comprising:
- a marking means for marking the identification symbols on the wafer surface;
- a reading means for reading the marked identification symbols on the wafer surface;
- a comparing means for making comparison of data of the marked symbols which are read by the reading means with basic data on which said identification symbols are marked on the wafer surface;
- and a judging means for inspecting and judging from the result of the comparison of the both data whether the identification symbols are correctly marked on said wafer surface.
1 more element
Dependencies are inferred from the claim text.