Supported getter
AssigneeSaes Getters S.P.A.
InventorsAldo Barosi, Brian Storey, Tiziano A. Giorgi, Paolo DELLA Porta
Life of this patent
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Abstract
This invention relates to a supported getter device comprising a metallic support structure consisting of a three-dimensional network defining a multiplicity of inter-connecting free cells and a particulate getter material substantially filling at least some of said free cells. This invention also relates to a getter device comprising at least one attachment zone of a compressed three-dimensional metal network attached to at least one supported getter material zone comprising a three-dimensional metal network. Methods of making the getter devices are described.
Claims7
A getter device comprising:
- (a) a titanium or nickel support structure consisting of a three-dimensional network defining a multiplicity of inter-connecting free cells having between 25 and 100 cells per inch and
- (b) a getter material comprising:
- (i) particulate zirconium
- (ii) particulate graphite
- wherein the weight ratio of (i) :
- (ii) is from 20:1 to 2:1, said getter material substantially filling a plurality of said free cells and affixed therein.
A getter device comprising:
- (a) a titanium or nickel support structure consisting of a three-dimensional network defining a multiplicity of inter-connecting free cells having between 25 and 100 cells per inch and
- (b) a getter material comprising:
- (i) a particulate zirconium
- (ii) a particulate alloy of 13 to 18 weight percent aluminum balance zirconium
- wherein the weight ratio of (i) to (ii) is from 10:1 to 1:1, said getter material substantially filling a plurality of said free cells and affixed therein.
A getter device comprising at least one attachment zone and at least one supported getter material zone wherein
- (a) the attachment zone comprises a compressed metallic structure consisting of a three-dimensional network defining a multiplicity of inter-connecting free cells and
- (b) the supported getter material zone comprises
- (i) a metallic support structure constructed of metal selected from the group consisting of nickel, chromium, iron, titanium, cobalt, molybdenum and alloys containing at least one of these metals, consisting of a three-dimensional network defining a multiplicity of inter-connecting free cells having between 10 and 125 cells per inch and
- (ii) a particulate non-evaporating getter material comprising at least one metal selected from the group consisting of Zr, Ta, Hf, Nb, Ti, Th, and U, substantially filling a plurality of said free cells and affixed therein.
A getter device comprising at least one attachment zone and at least one supported getter material zone wherein
- (a) the attachment zone comprises a compressed metallic structure consisting of a three-dimensional network defining a multiplicity of inter-connecting free cells and
- (b) the supported getter material zone comprises
- (i) a metallic support structure consisting of a three-dimensional network defining a multiplicity of inter-connecting free cells having between 10 and 125 cells per inch and
- (ii) a getter material comprising
- (A) particulate zirconium
- (B) particulate graphite
- wherein the weight ratio of (A) to (B) is from 20:1 to 2:1, said getter material substantially filling a plurality of said free cells and affixed therein.
A getter device comprising at least one attachment zone and at least one supported getter material zone wherein
- (a) the attachment zone comprises a compressed metallic structure consisting of a three-dimensional network defining a multiplicity of inter-connecting free cells and
- (b) the supported getter material zone comprises
- (i) a metallic support structure consisting of a three-dimensional network defining a multiplicity of inter-connecting free cells having between 10 and 125 cells per inch and
- (ii) a getter material comprising
- (A) particulate zirconium
- (B) a particulate alloy of 13 to 18 weight percent aluminum balance zirconium
- wherein the weight of (A) to (B) is from 10:1 to 1:1, said getter material substantially filling a plurality of free cells and affixed therein.
Dependencies are inferred from the claim text.