Method of reticulating a pyroelectric vidicon target
AssigneeNorth American Philips Corporation
InventorsBarry M. Singer, Yannick J. Thefaine
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Abstract
A method of fabricating a pyroelectric vidicon target wherein a layer of pyroelectric material is attached to a substrate, reduced in thickness, reticulated, covered with an electron permeable support layer, removed from the substrate, and covered with a layer of silicon oxide on the side scanned by the electron beam.
Claims6
In the manufacture of a target for a pyroelectric vidicon, the steps of attaching a layer of pyroelectric target material to a support substrate, reducing the thickness of said layer to about 20 .mu.m, etching through a mask to thereby reticulate the target, forming an electron-pervious polymer layer over said layer of reticulated pyroelectric material, and removing the layer of reticulated pyroelectric material from said support substrate.
Dependencies are inferred from the claim text.