Process for chemical vapor deposition of a homogeneous alloy of refractory metals
AssigneeThe United States of America as represented by the Secretary of the Army
InventorFred A. Glaski
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Abstract
A coating of refactory metals alloy, e.g. an alloy of tantalum and tungsten, is deposited on a substrate, such as the bore of a gun barrel, by reacting an alloy of the refractory metals with chlorine to form a mixture of the vapors of the refractory metal chlorides and reacting the resulting mixture of vapors with hydrogen to reduce the metal chlorides to the free metals. The alloy coating thus deposited possesses a finer grain structure and is more homogeneous and ductile than one obtained by chlorinating the tantalum and tungsten metals separately.
Claims3
In a process of vapor depositing an alloy consisting essentially of refractory metals selected from the group consisting of tantalum, tungsten, molybdenum and niobium, on a substrate, wherein a coating of the alloy is deposited by reducing a mixture of the vapors of the refractory metal chlorides with hydrogen, the improvement which comprises generating the mixture of the vapors of the metal chlorides by contacting an alloy of the refractory metals with gaseous chlorine and reacting the resulting mixture of vapors with gaseous hydrogen.
Dependencies are inferred from the claim text.