Spectroscopy
AssigneeU.S. Philips Corporation
InventorsJames H. Neave, Michael R. Boudry
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AssigneeU.S. Philips Corporation
InventorsJames H. Neave, Michael R. Boudry
Estimating the term…
A method of performing Auger electron spectroscopic surface analysis, e.g. of silicon, in which the secondary electrons which leave the target material are analyzed without the use of an electron optic device. An a.c. signal modulated retard potential is applied in ramp form to the target and a detection circuit connected to the target measures the component of current to earth from the target at the second harmonic of the a.c. modulation signal. The output of the detection circuit is plotted as a function of the retard potential to produce a spectrum of the first derivative of the secondary electron energy with respect to the retard potential so as to enhance the display of Auger transitions. Alternative realizations are described of a circuit arrangement including a four-port network for coupling the target, a.c. modulation signal source, retard potential source, and detector circuit.
A method of performing electron spectroscopic surface analysis of a solid material, comprising the steps of directing a primary electron beam from a gun at a surface of a target of said material in a vacuum chamber, said primary electron beam being of energy suitable for the production of Auger electron emission from said target surface, applying an a.c. signal modulated variable retard potential to said target, providing a detector circuit connected to said target, said detector circuit is tuned to measure the second harmionic of the a.c. modulation signal, measuring with said detector circuit a current one separable component of said detector circuit being proportional to the instantaneous net emitted flux of secondary electrons which leave the target as a function of the retard potential, producing with said measured current as a function of the retard potential, an energy spectrum of said secondary electrons characteristic of the target surface and plotting the detector output as a function of the retard potential to produce a spectrum of the first derivative of the secondary electron energy with respect to the retard potential so as to enhance the display of Auger transitions.
Dependencies are inferred from the claim text.