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US 4,128,765 AGranted
Ion beam machining techniques and apparatus
OwnerJoseph Franksinventor
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OwnerJoseph Franksinventor
Estimating the term…
Method for producing specimens suitable for examination by electron microscopy techniques in accordance with which at least one ion beam from an ion source is directed onto a specimen while effecting relative rotation between the ion source(s) and the specimen and simultaneously varying the angle of incidence of ion beam(s) whereby the angle of incidence of the ion beam(s) on the specimen is varied in a random manner. The ion source(s) may remain stationary while rotating and rocking the specimen or the ion source(s) may be rocked and the specimen rotated and rocked or the specimen may remain stationary while rocking and rotating the ion source(s) or both the source(s) and the specimen may be rotated and rocked. In apparatus for carrying out the method of the invention there is provided specimen support means and means for rotating same, at least one ion source adapted to direct at least one ion beam onto the specimen and means for varying the angle of incidence of the ion beam(s) on the surface of the specimen.
A method of ion beam machining for the preparation of specimens to be examined by electron microscopy techniques comprising directing at least one ion beam from an ion source onto a specimen while effecting relative rotation between the ion source and the specimen and simultaneously varying the angle of incidence of said at least one ion beam on said specimen with such angle varying in a random manner with respect to said relative rotation of said ion source and said specimen.
Apparatus for ion beam machining of electron microscopy specimens comprising rotatable means for supporting a specimen, means actuable for rotating said specimen supporting means, at least one ion source adapted to direct at least one ion beam onto said specimen, means supporting said ion source for relative movement between the plane of rotation of said specimen support means and said ion source, and means nonsynchronized with said specimen support rotating means and actuable for varying the angle of incidence of said at least one ion beam on the surface of said specimen to avoid the same angle of incidence of said beam on a rotating point on said specimen at the end of successive revolutions of said specimen.
Dependencies are inferred from the claim text.