Methods and apparatus for producing unsupported monocrystalline films of silicon and of other materials
OwnerSolomon Zarombinventor
Life of this patent
Estimating the term…
Abstract
This invention deals with methods and apparatus for producing unsupported monocrystalline films of silicon, germanium, gallium aresenide, and many other semiconductors and other materials. Said methods comprise: (a) repetitively using a monocrystalline substrate S having a crystal structure closely matching that of the desired films; (b) epitaxially depositing on substrate S first an intermediate monocrystalline layer I and next an outer monocrystalline layer 0 so as to form a three-layer S-I-O configuration, said three layers having closely matching crystal structures; and (c) at least partly disintegrating said intermediate layer I so as to free said outer layer 0 and make substrate S available to repeat the same cycle.
Claims3
A method of producing unsupported monocrystalline films which comprises:
- (a) providing at least one reusable monocrystalline substrate S having a crystal structure closely matching that of the desired films;
- (b) epitaxially depositing on the lower surface of substrate S first an intermediate monocrystalline layer I and next an outer monocrystalline layer O so as to form a three-layer S-I-O configuration, said three layers having closely matching crystal structures;
- (c) reducing the ambient pressure below the vapor pressure of at least one component of said intermediate layer I, or raising the temperature of said intermediate layer so as to raise the vapor pressure of at least one of its components above the ambient pressure, thereby blowing off said outer layer O and causing it to fall by gravity onto a supporting base;
- and
- (d) recycling substrate S.
Dependencies are inferred from the claim text.