Spin coating process
AssigneeFuji Photo Film Co., Ltd.
InventorsMasamichi Sato, Itsuo Fujii
Life of this patent
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Abstract
A process of spin coating a coating composition on the surface of a base plate, comprising supplying a material which is compatable with the coating composition, in either a liquid or vapor form, to the opposite surface of the base plate to the surface on which the coating composition has been supplied (hereinafter "back surface" or "back side") while rotating the base plate to remove the coating composition flowing to the back surface or to the edge portion of the plate. The material compatible with the coating composition may be applied to the surface of the base plate at the periphery thereof to reduce or remove the coating composition there.
Claims14
A process of spin coating a coating composition on a surface of a base plate which comprises projecting material, which is compatible or dissolves the coating composition, in a liquid or vapor form to the opposite surface of the base plate to the surface on which the coating composition has been supplied while rotating the base plate to remove the coating composition flowing to the opposite surface and/or the edge of the base plate.
Dependencies are inferred from the claim text.