Process for rendering kapton or other polyimide film photo sensitive to catalyst for the deposition of various metals in pattern thereon
AssigneeAMP Incorporated
InventorsAlbert Shirk, John Peter Redmond
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Abstract
Deposition of metal onto a polyimide film by an electroless method is disclosed. The subject method finds particular application in generating metal patterns on polyimide substrates, such as films. The subject method employs a photographic like technique for generating on a polyimide substrate, a pattern capable of attracting thereon a precious metal-salt which is useable as a catalyst in an electroless plating process. The methods disclosed are useable in an electroless plating process to produce a metallic pattern, such as an electric circuit pattern for mounting integrated circuit chips, etc.
Claims12
A method for forming patterns on a polyimide film substrate comprising the steps of:
- immersing said polyimide in a hydrazine-alkali metal hydroxide solution;
- exposing selected areas of the thus treated polyimide substrate to a desensitizing means in the form of ultraviolet light of 2537 A;
- immersing said substrate in a solution of a catalytic material of palladium salts and hydrochloric acid;
- and depositing unreduced catalyst material on nondesensitized areas of said substrate.
A process for sensitizing a polyimide film which comprises the steps of:
- (a) sensitizing said polyimide film by immersion in a solution of hydrazine, dimethyl hydrazine, monomethyl hydrazine, or phenyl hydrazine, or mixtures of same in admixture with an alkali metal hydroxide solution;
- (b) desensitizing said sensitized polymer in selected areas of the surface by an ultraviolet radiation of less than 3000 A thereby preserving sensitized areas on said surface of said film;
- (c) immersing said film with said sensitized areas into a catalyst solution of palladous salt for deposition of catalyst metal only onto said sensitized areas;
- and
- (d) immersing said film in an electroless metal bath for plating a metal catalytically depositable from said bath by said catalyst solution.
Dependencies are inferred from the claim text.