Back to results
US 4,112,137 AGranted
Process for coating insulating substrates by reactive ion plating
AssigneeBattelle Memorial Institute
InventorBogdan Zega
Life of this patent
Estimating the term…
Abstract
An insulating substrate, such as a glass windscreen, is coated with a conductive coating of an oxide of at least one metal by a process in which the substrate is subjected, in a rarefied oxygen atmosphere, to metal ions and oxygen ions arising from bombardment of a metal source with an electron beam and the proximity to the substrate of a negatively biased grid serving to accelerate the metal ions to the substrate where they combine with oxygen to form an oxide coating.
Claims14
A process for coating an insulating substrate with an oxide of at least one metal by reactive-ion plating, comprising the steps of:
- disposing a source of a vaporizable metallic mass in a sealed enclosure;
- maintaining in said enclosure a rarefied oxygen atmosphere at a pressure capable of sustaining a glow dishcarge;
- training at least one electron beam upon said source to vaporize said metallic mass;
- disposing a substrate to be coated in said enclosure at a location spaced from the origin of said electron beam and remote from said source;
- interposing a conductive grid within said enclosure between said location and said source in proximity to said substrate;
- and
- negatively biasing said grid with reference to said source with a voltage sufficient to develop a glow discharge therebetween for ionizing, jointly with said beam, part of the metal vapors emitted by said source and part of the oxygen of said atmosphere with acceleration of the interacting metal-vapor and oxygen ions toward said substrate to deposit thereon a resulting oxide.
4 more elements
Dependencies are inferred from the claim text.