Method for depositing film on a substrate
OwnerJoseph E. Berg, Randolph E. Brown, Jr.inventors
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OwnerJoseph E. Berg, Randolph E. Brown, Jr.inventors
Estimating the term…
Method and apparatus for use of emitting, ionizing, accelerating and collecting elements in a high vacuum to implant a hard film on a plastic substrate or the like. In preparation, a slug of a selected material to be deposited as a film is placed in the emitter. The specimens or articles to be implanted are placed on supports in the vicinity of the collector. A cover enclosure is then placed in position and the region enclosed by the cover is exhausted to a high vacuum. Selected potentials are applied to various elements of the apparatus and an accelerating/directing field, which may be developed electrostatically, magnetically or by a combination of both, is developed in the acceleration structure. The electrostatic field causes electron emission from the ionizing elements to develop an increased charge on the emitted ionized particles. When implantation is to begin, a shutter control is moved out of beam blocking position and ionized particles from the emitter pick up additional charge from the ionizing elements and are accelerated to high velocity for bombarding the specimens. The collector is provided near the end of the enclosure beyond the specimen support region. The specimens are discharged regularly to eliminate the build-up of surface charge from the stream of bombarding ions.
The method of depositing and implanting a film on a substrate within an airtight enclosure comprising the steps of:
The method of fabricating a tinted plastic transparent device having a hardened film coating comprising the steps of:
The method of developing fire resistant properties for an article having a combustible surface material comprising the steps of:
The method of implanting a protective film on a substrate comprising:
The method of implanting ionized particles of a selected material on a specimen surface and building up a film thereon, the method comprising:
Dependencies are inferred from the claim text.