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US 4,107,019 AGranted
Solid electrolyte thin film oxygen sensor having thin film heater
AssigneeNissan Motor Co., Ltd.
InventorsHiroshi Takao, Kazuo Matoba
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Abstract
An oxygen sensor made up of an oxygen concentration cell which as a stratiform structure and includes a thin film of an oxygen ion conductive solid electrolyte and a thin layer of a material serving as the source of a reference oxygen partial pressure such as a Ni-NiO system, an electrically nonconductive base plate which supports thereon the cell, and a thin metal layer embedded in the base plate as a resistance heating element for heating the solid electrolyte film.
Claims10
An oxygen sensor of an oxygen concentration cell type, comprising:
- a base plate of an electrically nonconductive material;
- a thin layer laid on one side of said base plate, said thin layer being of a material which is composed of a metal and an oxide of said metal and serves as the source of a reference oxygen partial pressure;
- a thin layer of an oxygen ion conductive solid electrolyte laid on the metal-oxide layer so as to entirely shield the metal-oxide layer from the atmosphere;
- an electron conductive and gas permeable thin layer coated on the solid electrolyte layer;
- and
- a thin metal layer which has a resistance suitable as a resistance heating element and is embedded in said base plate to lie generally parallel to the solid electrolyte layer.
3 more elements
Dependencies are inferred from the claim text.