Process for the purification of silane

Abstract

A process for the purification of a mixture of silane and impurities comprising passing the mixture through a succession of zones connected in series, in a closed system, according to the following steps: (a) passing the mixture, in gaseous form, through a zone containing porous, granular charcoal as an adsorbent at a temperature in the range of about minus 40.degree. C to about minus 80.degree. C to provide a mixture of silane and remaining impurities in gaseous form; (b) passing the gaseous mixture from step (a) through a zone containing porous, granular magnesium silicate as a adsorbent at a temperature in the range of about minus 40.degree. C to about minus 80.degree. C to provide a mixture of silane and remaining impurities in gaseous form; (c) passing the gaseous mixture from step (b) into a distillation zone in such a manner that the impurities are removed overhead in gaseous form and at least about 95 per cent by weight of the silane is converted to liquid bottoms; and (d) recovering the bottoms.

Dependencies are inferred from the claim text.