Susceptor for heating semiconductor substrates
AssigneeRCA Corporation
InventorsSamuel Berkman, Donald Bertram Irish
Life of this patent
Estimating the term…
Abstract
An integral graphite susceptor of the type comprising a hollow polyhedron, adapted to support a semiconductor substrate on an outer planar surface of a wall thereof, has a recessed cavity adjacent the inner surface of the wall and shaped so that the floor of the cavity is parallel to the outer planar surface. The cavity may comprise an oblong-shaped slot machined into the wall of the susceptor, which is typically a hollow truncated pyramid.
Claims7
In a susceptor of the type comprising a hollow polyhedron adapted to support a substrate on an outer planar surface of a wall thereof, said wall having corner portions thereof thicker than the central portions thereof, the improvement comprising said wall having a recessed cavity adjacent the inner surface thereof, said cavity having the floor thereof parallel to said outer planar surface.
Dependencies are inferred from the claim text.