High resolution matrix lens electron optical system

An electron optical system for use in deflecting a beam of collimated electrons emitted by source means along an axis of said optical system toward a surface of target means spaced from said source means, comprising:

• electron lens means positioned along said system axis between said source and target means and having an array of a plurality of lenslets each adapted for focussing a beam of electrons impinging thereon substantially to a point at a selected distance beyond said lens means toward said target means;
• first means for forming a magnetic field of substantially constant amplitude essentially along said system axis at least between said lens and target means;
• first deflection means for selectably deflecting said electron beam axially emitted from said source beam to illuminate a selected one of said plurality of said lenslets;
• and
• second deflection means positioned between said lens and target means for relaying and deflecting the focussed beam of electrons to a selected impact site upon said target means surface responsive to the magnitude and polarity of a variable electric field and to said axial magnetic field contained within said second deflection means.