Removal of thin films from substrates by laser induced explosion
AssigneeWestern Electric Company, Inc.
InventorsJackson Chik-Yun Koo, Vincent Joseph Zaleckas
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Abstract
Selected portions of a thin film coating of metal are removed from an insulative substrate by directing a coherent beam of light energy from a laser at the coating, to heat the coating and cause the evaporation and entrapment of the substrate material at the coating-substrate interface. A positive pressure builds up at the interface resulting in an explosion which removes the coating material.
Claims10
A method for the removal of a metallic thin film coating from a substrate, comprising the steps of:
- directing a beam of radiant energy to heat the thin film coating to a temperature below the melting temperature of the coating material and above the vaporization temperature of the substrate to heat and cause vaporization of the substrate at the thin film-substrate interface;
- and
- entrapping the vapors at said interface to induce an explosion to remove the thin film coating from the substrate.
A method of selectively removing portions of a metallic thin film coating from a substrate, comprising the steps of:
- placing an apertured, heat resistant mask on the coated substrate;
- raster scanning the masked, coated substrate with a coherent laser beam focused at the thin film coating to heat portions of the coating which are exposed through the apertures to a temperature below the melting temperature of the coating material and above the vaporization temperature of the substrate at the thin film-substrate interface;
- and
- entrapping the vapors at said interface to induce an explosion to remove the selected portions of the thin film coating from the substrate.
A method of fabricating a printed circuit board by selectively removing portions of a metallic thin film coating from an insulative substrate, comprising the steps of:
- (a) placing a transparent film over the metallic thin film coating;
- (b) further placing a metallic, apertured heat resistant mask on the tranparent film;
- (c) raster scanning the mask with a coherent laser beam focused at the metallic thin film coating to heat portions of the coating, which are exposed through the apertures, to a temperature below the melting temperature of the metallic thin film coating and above the vaporization temperature of the dielectric substrate at the metallic thin film-insulative substrate interface;
- and
- (d) entrapping the vapors of the substrate at said interface to induce an explosion to remove the selected portions of the metallic thin film coating from the insulative substrate.
Dependencies are inferred from the claim text.