Multichamber vapor deposition process

A process for altering the surface characteristic of articles by exposing them to a gaseous fluid of an essentially predetermined composition wherein said fluid is comprised of one or more components which are reactive with the surface of said articles, said process comprising the steps of:

• a. admitting said fluid comprised of a known concentration of said one or more components to an apparatus comprised of at least one sealed reaction chamber and at least one sealed holding chamber, each of said chambers having sealable access means for the optional introduction of at least one of said articles, whereby said holding chamber may optionally be utilized as only a holding chamber for said fluid or additionally as a second reaction chamber;
• b. establishing a conduit system communicating said chambers and utilizing vacuum means therewith for selectively creating pressure differentials between said chambers whereby said fluid is transferred between said chambers and each chamber is alternately evacuated or charged with said gaseous fluid;
• c. synchronizing a feed and discharge of said articles with respect to said evacuating and charging in said chambers whereby to effect said altering of surface characteristics;
• and
• d. in conjunction with said fluid transfer, separating out reaction by-products and contaminants.