Combined vacuum baffle and valve for diffusion pump
AssigneeFinnigan Corporation
InventorsRonald D. Smith, Steven B. Frankel, John R. Reeher, Michael S. Story
Life of this patent
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Abstract
In a vacuum system a baffle-valve acts first as a baffle to reduce the backstreaming of a diffusion pump fluid into the main vacuum chamber being evacuated and secondly it can be used as a valve to provide complete isolation between the diffusion pump and the vacuum chamber. This enables the chamber to be open for service work while the diffusion pump is kept operating for rapid pump down. The foregoing dual use of the baffle/valve increases pumping efficiency because of higher conductance.
Claims2
A vacuum system having a pumped chamber and means for connecting said pumped chamber to a vacuum chamber said system comprising:
- dual function means located in said pumped chamber for both closing said connection in one position and serving as an optical backstream baffle in another position to prevent backstreaming such dual function means also being spaced a sufficient distance from the walls of the pumped chamber and said connection to provide a relatively high conductance between said pumped chamber and vacuum chamber;
- and means for cooling said dual function means in said baffle position, and where said dual function means includes a plate of high thermal conductivity and a flexible contact plate mounted on said high conductivity plate and where said cooling means is a fixed coil against which said contact plate is deformed in said baffle position.
Dependencies are inferred from the claim text.