Process for production of a resistance element for resistance thermometers
AssigneeDeutsche Gold- und Silber-Scheideanstalt vormals Roessler
InventorsWalter Diehl, Wolfgang Koehler
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Abstract
There is provided a process of producing a resistance element for a resistance thermometer consisting of a thin platinum layer on an insulating solid as a carrier, by sputtering the platinum layer on the solid in a krypton-oxygen or xenon-oxygen mixture.
Claims10
A process of producing a resistance element for a resistance thermometer by sputtering, said resistance element consisting essentially of a thin platinum layer as the resistance material on an insulating material as a substrate, the improvement comprising applying the platinum to the substrate by sputtering in a gaseous oxidizing atmosphere consisting essentially of krypton-oxygen or xenon-oxygen.
Dependencies are inferred from the claim text.