Solid state force transducer and method of making same

In a method for fabricating a solid state force transducer, the steps of:

• forming a leaf spring structure in a wafer by recessing the leaf spring pattern at a selected location through a first major face of said wafer;
• and
• recessing a second recess at a selected location in registration with said first recessed pattern, through the opposite major face of said wafer and intersecting said second recess with said first recessed pattern to define said leaf spring structure.

In a method for fabricating a solid state force transducer, the steps of:

• forming a leaf spring structure in a wafer by recessing a leaf spring pattern at a selected location through a first major face of said wafer;
• said recessed leaf spring pattern including a pair of mutually opposed E-shaped leaf spring pattern portions, each E-shaped spring pattern portion including a deflectable central leg portion extending outwardly from a central region of the spring structure and a pair of leg portions on opposite sides of and extending outwardly from said central region generally parallel to said central leg portion, said outer leg portions being supported at their inner ends from a portion of the wafer and being interconnected at their outer ends to the outer end of said central leg portion for deflection therewith.