Random access memory cell with ion implanted resistor element
AssigneeTexas Instruments Incorporated
InventorsG. R. Mohan Rao, Gerald R. Rogers, David J. McElroy
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Abstract
A self-refresh MOS RAM cell uses a resistor element made by an ion implant step compatable with a self-aligned N-channel silicon-gate process. The resistor element is beneath the field oxide in the finished device, although the implant step is prior to formation of the thick oxide. The cell employs two transistors and a gated capacitor, connected in a manner such that a stored "1" switches the implanted resistor to a high impedance state, while a stored "0" maintains the resistor in a relatively low resistance state.
Claims13
A semiconductor integrated circuit comprising first and second MOS transistors each having a source-drain path and a gate, the source-drain path of the first transistor being connected between a first node and a source of logic levels, the gate of the first transistor being connected to a different source of logic levels, the source-drain path of the second transistor being connected between the first node and a voltage supply, an intermittent voltage source coupled to the gate of the second transistor at a second node, and an impedance element connecting the first node to the second node, the impedance element exhibiting a low impedance state when the voltage on the first and second nodes is relatively low and exhibiting a high impedance state when the voltage on the first and second nodes is relatively high.
A storage cell comprising an address line, a data line, a storage node, a first controlled switching device having a current path connecting the data line to the storage node and being controlled by the address line, a voltage supply, a second controlled switching device connecting the storage node to the voltage supply, resistance means connecting the storage node to a refresh node, the refresh node being connected to the control element of the second switching device, and means for applying an intermittent voltage to the refresh node.
Dependencies are inferred from the claim text.