Multi-apertured single plate matrix lens
AssigneeGeneral Electric Company
InventorsWilliam C. Hughes, Harold G. Parks
Life of this patent
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AssigneeGeneral Electric Company
InventorsWilliam C. Hughes, Harold G. Parks
Estimating the term…
An improved matrix lens for use in an electron beam optical system of the type having first means for forming a narrow beam of electrons, coarse deflection means associated with the first means for scanning the electron beam to each lenslet of a matrix array of individual lenslets each focussing the beam upon a predetermined portion of a target surface, and fine deflection means cooperating with the matrix lenslet array for scanning the electron beam to each of a plurality of locations in a two dimensional array defined upon the target surface, the improvement herein utilizing a single plate having multiple apertures for forming the matrix lens means and accelerator means utilized with all of the apertures of the lens means for uniform acceleration of the electron beam. An improved fine deflection means utilizes a magnetic deflector positioned adjacent to the under surface of the target and remote from the matrix lens.
A matrix lens for finely focussing a collimated electron beam upon a surface of a target, comprising:
A matrix lens for finely focussing a collimated electron beam upon a surface of a target, comprising:
Dependencies are inferred from the claim text.