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US 4,068,390 AGranted
Photomask dryer
AssigneeRCA Corporation
InventorsRobert Andrew Geshner, Louis Joseph Sciambi
Life of this patent
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Abstract
The dryer is used for drying developed photomasks of the type used in manufacturing integrated circuit devices. The dryer provides a continuous flow of very clean, warm, dry air over photomasks placed in it to dry. The dryer comprises a box having a series of distributor tubes extending into it. Drying racks holding photomasks hang from the distributor tubes and heated, filtered air flows from at least one slot in the distributor tube over the wet photomasks to dry them.
Claims12
A photomask dryer comprising:
- a. an enclosed box having at least one door;
- b. at least one heated air distributor tube extending into said box from a wall thereof said at least one distributor tube having at least one opening within said box through which air may pass from said at least one distributor tube downward into said box;
- c. filter means positioned within said at least one distributor tube for filtering and evenly distributing said air before said air leaves said at least one distributor tube within said box;
- d. means external to said box for heating said air which enters said at least one distributor tube;
- e. a rack adapted to be suspended from said at least one distributor tube and adapted to hold at least one photomask under said at least one opening whereby said at least one photomask placed in said rack will be positioned for drying beneath said at least one distributor tube, said rack being completely removable from said dryer.
2 more elements
Dependencies are inferred from the claim text.