Elastic surface wave devices
AssigneeTokyo Shibaura Electric Co., Ltd.
InventorsShouzo Takeno, Masao Mashita, Toshihiro Onodera
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AssigneeTokyo Shibaura Electric Co., Ltd.
InventorsShouzo Takeno, Masao Mashita, Toshihiro Onodera
Estimating the term…
The elastic surface wave device comprises a piezoelectric substrate having a dielectric constant of .epsilon..sub.2, a dielectric film having a dielectric constant of .epsilon..sub.1 and a thickness of h, and deposited on the piezoelectric substrate, and an inter-digital type input-ouput transducer formed on the dielectric film. The ratio of the dielectric constants .epsilon..sub.1 /.epsilon..sub.2, and a function 2.pi./.lambda..multidot.h proportioned to the thickness of the dielectric film are selected to satisfy a condition established in a frustum shaped region bounded by coordinate points P (.epsilon..sub.1 /.epsilon..sub.2 = 1/5,(2.pi./.lambda.).multidot.h = 0.1), Q(.epsilon..sub.1 /.epsilon..sub.2 = 1/5,(2.pi./.lambda.).multidot.h = 0.00016), R(.epsilon..sub.1 /.epsilon..sub.2 = 1/500,(2.pi./.lambda.).multidot.h = 0.0004), and S(.epsilon..sub.1 /.epsilon..sub.2 = 1/500, (2.pi./.lambda.).multidot.h = 0.006) on a graph wherein the ratio .epsilon..sub.1 /.epsilon..sub.2 is represented on the ordinate and the function (2.pi./80 ).multidot.h on the abscissa, where .lambda. represents the wavelength of the elastic surface wave. As a result, the energy of the elastic surface waves is propagated from the input transducer to the output transducer with a sufficiently large power.
An elastic surface wave device comprising a piezoelectric substrate having a dielectric constant of .epsilon..sub.2, a dielectric film formed on said piezoelectric substrate and having a thickness of h and a dielectric constant of .epsilon..sub.1, and an input-output transducer formed on said dielectric film, wherein the ratio of the dielectric constants .epsilon..sub.1 /.epsilon..sub.2 of said piezoelectric substrate and said dielectric film, and a function (2.pi./.lambda.).multidot.h proportional to the thickness of said dielectric film are selected to satisfy a condition established in a frustum shaped region bounded by coordinate points p (.epsilon..sub.1 /.epsilon..sub.2 = 1/5, (2.pi./.lambda.).multidot.h=0.1), Q(.epsilon..sub.1 /.epsilon..sub.2 = 1/5, (2.pi. /.lambda.).multidot.h = 0.00016), R(.epsilon..sub.1 /.epsilon..sub.2 = 1/500, (2.pi./.lambda.).multidot.h = 0.0004) and 5(.epsilon..sub.1 /.epsilon..sub.2 = 1/500, (2.pi./.lambda.).multidot. h = 0.0006) on a graph wherein said ratio .epsilon..sub.1 /.epsilon..sub.2 is represented on the ordinate and said function (2.pi./.lambda.).multidot.h on the abscissa, where .lambda. represents the wavelength of the elastic surface wave without the dielectric film.
An elastic surface wave device comprising a ceramic piezoelectric substrate, a titanium dioxide dielectric film deposited on said piezoelectric substrate, and an interdigital type input-output tranducer formed on said titanium dioxide dielectric film for converting an elastic surface wave energy, said titanium dioxide dielectric film having a thickness of 0.00016 .lambda. to 0.047 .lambda., where .lambda. represents the wavelength of the elastic surface wave without the dielectric film.
An elastic surface wave device comprising a ceramic piezoelectric substrate, a zirconium dioxide dielectric film deposited on said piezoelectric substrate, and an inter-digital type input-output transducer formed on said zirconium dioxide dielectric film for converting an elastic surface wave, said zirconium dioxide dielectric film having a thickness of from 0.0004.lambda. to 1/100 .lambda., where .lambda. represents the wavelength of said elastic surface wave.
Dependencies are inferred from the claim text.