US 4,065,369 A · Activated gas reaction apparatus & method

Abstract

An activated gas reaction apparatus which comprises an activation chamber; feeding means for conducting feed gas into the activation chamber; microwave power-generating means for activating raw gas received in the activation chamber; and a reaction chamber provided apart from the activation chamber for reaction of activated gas, the activated gas reaction apparatus so constructed as to satisfy the following formula: 2.pi.fpl .gtoreq. 4 .times. 10.sup.9 where f = frequency (Hz) of microwaves p = gas pressure (torr) in the activation chamber L = length (cm) of the activation chamber extending in the direction in which the electromagnetic field provided by the microwave source is applied.

Claims10

Dependent claims

An activated gas reaction process comprising:

conducting feed gas to an activation chamber,
activating the feed gas in the activation chamber by applying microwave power to the feed gas from a microwave source under the conditions which satisfy the following formula:
2.pi.fpl .gtoreq. 4 .times. 10.sup.9
where:
f = frequency of microwaves in Hz,
p = gas pressure in the activation chamber in torr,
l = length of the activation chamber in cm. extending in the direction in which the electromagnetic field is provided by the microwave source,
conducting the activated gas delivered from the activation chamber to a reaction chamber apart from the activation chamber and,
reacting the activated gas with a non-gaseous material in the reaction chamber.

6 more elements

Dependencies are inferred from the claim text.

Activated gas reaction apparatus & method

Life of this patent

Activated gas reaction apparatus & method

Life of this patent

Abstract

Claims10