Apparatus for cleaning workpieces by ultrasonic energy
AssigneeBranson Ultrasonics Corporation
InventorsJean G. M. Dussault, Robert A. Geckle, William L. Puskas
Life of this patent
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Abstract
A delicate workpiece, such as a semiconductor wafer is cleaned by supporting the workpiece on a shaft which is rotated. A film of liquid solvent is caused to continuously flow across the exposed workpiece surface while the workpiece is in rotation and ultrasonic energy is applied to the liquid film for causing cavitation in the solvent, thereby effecting cleaning of the workpiece surface. Upon shutting off the solvent and the ultrasonic energy, the workpiece is dried by spinning it at high speed.
Claims13
Apparatus for cleaning a workpiece, such as a semiconductor wafer, comprising:
- a rotatable support including means for holding a workpiece on said support;
- means coupled to said support for rotating said support to cause a workpiece disposed on said support to undergo rotation;
- means for flooding the exposed side of the workpiece with a flowing film of cleaning solvent;
- mounting means disposed for supporting electroacoustic transducer means opposite said exposed side;
- electroacoustic transducer means coupled to said mounting means for providing, when said transducer means is energized, ultrasonic energy to said flowing film of solvent and causing cavitation therein for cleaning said exposed workpiece side;
- electrical generating means coupled for energizing said transducer means, and
- control means coupled to said means for rotating, said means for flooding and said electrical generating means for providing operation of said respective means in predetermined sequence.
Apparatus for cleaning a workpiece, such as a semiconductor wafer, comprising:
- a rotatable support including means for holding a workpiece on said support;
- means for flooding the exposed side of the workpiece with a flowing film of cleaning solvent;
- mounting means disposed for supporting electroacoustic transducer means opposite said exposed side;
- electroacoustic transducer means coupled to said mounting means for providing, when said transducer means is energized, ultrasonic energy to said flowing film of solvent and causing cavitation therein for cleaning said exposed workpiece side;
- electrical generating means coupled for energizing said transducer means;
- means coupled to said support for rotating said support at a speed sufficient to effect solvent removal from the exposed workpiece side by centrifugal force, and
- control means coupled to said means for flooding, said electrical generating means and said means for rotating for providing operation of said respective means in predetermined sequence.
Dependencies are inferred from the claim text.