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US 4,063,192 AGranted
Krypton fluoride excimer laser utilizing nitrogen trifluoride as a fluorine donor
AssigneeNorthrop Corporation
InventorsMani Lal Bhaumik, Robert Spencer Bradford, Jr., Earl Rema Ault, Philip Clyde Stevens
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Abstract
A laser using an electron beam pump mixture of argon, krypton and nitrogen trifluoride. High power krypton fluoride laser emission is efficiently generated by employing nitrogen trifluoride as a fluorine donor.
Claims5
A KrF laser comprising:
- a gas chamber,
- a pair of reflectors, one of which is only partially reflective, positioned opposite each other to define a laser ocsillator cavity which passes through the chamber,
- a gas mixture comprising Ar, Kr and NF.sub.3 being fed to said chamber, and
- laser pump means for exciting the gas mixture, NF.sub.3 operating as a fluorine donor to the Kr to form KrF, the pump means effecting a population inversion in the KrF whereby KrF laser emission passes through said partial reflector.
1 more element
Dependencies are inferred from the claim text.