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US 4,062,750 AGranted
Thin film electrochemical electrode and cell
OwnerJames Francis Butlerinventor
Life of this patent
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OwnerJames Francis Butlerinventor
Estimating the term…
A thin film polarographic oxygen sensor, in which a number of thin film microcathodes are deposited in holes in a thin film layer of silicon dioxide formed on a silicon substrate. A single thin film anode layer is deposited on the insulating layer and is insulated thereby from the cathodes. Preferably the microcathodes and the anode are located in a well in the thin film insulating layer, the well being filled flush to its surface with electrolyte, and having a thin film polymer filter membrane deposited thereover. Contacts to the anode and cathodes may be punched through a thin film insulating layer on the back of the wafer, the cathode contact being thereby connected to the substrate, and the anode contact being insulated from the substrate by an encircling thin film layer of silicon dioxide and extending through to the anode metallization layer. With appropriate choice of electrode, electrolyte and membrane materials, the cell may also be used as a pH sensor, a CO.sub.2 sensor, a specific ion sensor, or to detect or sense other substances in solution. Single electrode units may also be formed by depositing thin film electrode materials on appropriate substrates.
An electro-chemical cell comprising:
An electro-chemical cell having a conductive substrate having first and second opposed faces, a first thin film insulating layer on said first face and a second thin film insulating layer on said second face, first and second electrodes arranged over said first face, said first electrode being electrically connected to said substrate and said second electrode being insulated from said substrate and said first electrode by said first insulating layer, said second insulating layer having a hole therein, a contact in second hole and electrically connected to said substrate thereby forming an electrical connection to said first electrode, said second insulating layer, said substrate and said first insulating layer having aligned holes therein, a further contact in said aligned holes and extending to said second electrode, the hole in said substrate having a wall of a thin film insulating material to insulate said further contact from said substrate.
A thin film electrode structure comprising a conductive substrate having a first face and a second face opposed to said first face, a first thin film insulating layer on said first face and having a well therein, a second thin film insulating layer on said second face, a thin film electrode in said well and electrically connected to said substrate, said second insulating layer having a hole therein, and a contact located in said hole and being in electrical contact with said substrate, said contact thereby being electrically connected to said electrode.
A thin film electrode structure comprising a conductive substrate having a first face and a second face opposed to said first face, a first thin film insulating layer on said first face, a second thin film insulating layer on said second face, an electrode over said first face and insulated from said substrate by said first insulating layer, said first and second insulating layers and said substrate including aligned holes therein, a contact located in said aligned holes and extending from said second insulating layer through to said electrode and being connected thereto, said substrate having a thin film insulating layer defining the wall of the hole therein and insulating said contact from said substrate.
Dependencies are inferred from the claim text.