Temperature control system
AssigneeKokusai Electric Corporation
InventorYouichi Mizushina
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Abstract
A system for controlling the temperature and/or temperature distribution in a semiconductor diffusion furnace. The temperature and/or temperature distribution inside the reactor tube of the furnace is directly detected by thermocouple means inserted in the reactor tube, and correction is effected with respect to the temperature and/or temperature distribution on the basis of the foregoing detection. There are also disclosed thermocouple devices for use with the aforementioned control system. Each of the thermocouple devices can be manufactured at lower cost and is arranged to provide for a high freedom of measurements.
Claims5
A system for establishing a uniform temperature distribution within a reactor tube of a furnace comprising:
- a. a furnace having a reactor tube therein,
- b. first temperature detection means disposed internally of said reactor tube,
- c. heater means disposed externally of said furnace for heating said furnace,
- d. first temperature control means responsive to said first temperature detection means for controlling said heater means,
- e. second temperature detection means disposed externally of said reactor tube and in the vicinity of said heater for detecting the temperature of said heater, and
- f. second temperature control means responsive to said second temperature detection means for controlling said heater means,
- whereby said heater is controlled to establish a uniform temperature distribution within said reactor tube.
Dependencies are inferred from the claim text.