Back to results
US 4,061,800 AGranted
Vapor desposition method
AssigneeApplied Materials, Inc.
InventorEmmett R. Anderson
Life of this patent
Estimating the term…
Abstract
Method and apparatus for effecting vapor deposition of a material on an object. The material is vaporized in a closed chamber, and the pressure is allowed to build up in the chamber as the material vaporizes. Thereafter, the chamber is opened, and the vapor is applied to the object in a super-heated, high pressure state. If desired, additional materials can be injected into the chamber and added to the vapor before the chamber is opened.
Claims6
In a method for effecting vapor deposition of a material on an object, the steps of:
- A. heating the material in a chamber isolated from the object to vaporize the material;
- B. maintaining the chamber in a sealed condition and heating the vaporized material to an elevated temperature and pressure to form a vapor of high kinetic energy;
- and
- C. opening the chamber to effect a rapid release of the highly pressurized vapor from the chamber to the object.
1 more element
Dependencies are inferred from the claim text.