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US 4,060,822 AGranted
Strip type radiation detector and method of making same
AssigneeSiemens Aktiengesellschaft
InventorsOttomar Jantsch, Ingmar Feigt, Wolf Rudiger Willig
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Abstract
An improved strip detector and a method for making such a detector in which a high resistivity N conduction semiconductor body has electrode strips formed thereon by diffusion which strips are formed so as to be covered by an oxide layer at the surface point of the PN junction and in which the opposite side of the semiconductor body then has a substantial amount of material etched away to form a thin semiconductor upon which strip electrodes which are perpendicular to the electrodes on the first side are then placed.
Claims9
A detector for ionizing radiation comprising:
- a. an N-conduction thin semi-conductor body having a resistivity of at least 100 ohm-cm and having two parallel flat sides;
- b. a plurality of diffused P conduction electrodes on one side of said semi-conductor in the form of parallel strips;
- c. an oxide layer covering the PN junctions on said one side;
- and
- d. a plurality of parallel metal electrodes in ohmic contact with the other side of said semi-conductor at an angle to the P conduction electrodes on said one side.
2 more elements
Dependencies are inferred from the claim text.