Automatic etching system
OwnerKeith E. Oxfordinventor
Life of this patent
Estimating the term…
Abstract
The composition of etchant solution withdrawn from an etcher is monitored to diagnose a component deficiency. A light sensor is responsive to the color density of light rays passing through the etchant. A meter relay is responsive to the light sensor and if the color density of the etchant falls outside preset levels a pump is energized causing addition of a constituent component into the etchant. A second light sensor senses the color density of the light rays passing through the etchant after the addition of the constituent component. A second meter relay is responsive to the second light sensor. If no improvement of the etchant color is detected, the second meter relay causes the discontinuance of the constituent component addition and switches to the addition of another constituent component.
Claims6
For use with an etching machine, an etchant regenerating system for automatically monitoring and regenerating etchant, said system comprising:
- means for circulating sample of etchant along a flow path,
- constituent component adding means for selectively adding a selected one of two constituent components to said flow path,
- first monitoring means upstream of said adding means for monitoring changes in the etchant composition and responsive upon monitoring etchant deficiency of a constituent component thereof for activating said constituent adding means,
- second monitoring means downstream of said adding means for monitoring changes in the etchant,
- said adding means responsive to said second monitoring means for selectively adding alternate ones of said constituent components into the etchant for a predetermined period of time until an improvement in the etchant quality is monitoring by said second monitoring means at which time selection of the improving constituent is maintained, and said first monitoring means maintaining the adding means in the addition mode until the etchant quality falls between preselected parameters,
- said first monitoring means comprises a light sensing means for sensing the intensity of light rays passing through a sample of the etchant,
- said second monitoring means compriese light sensing means for sensing the intensity of light rays passing through a sample of the etchant downstream of the constituent component adding means.
The apparatus of claim 5 comprising:
- time delay means for delaying energization of the apparatus for a predetermined time period after the detection of etchant flow.
For use with an etching machine, an etchant regenerating system for automatically monitoring and regenerating etchant, said system comprising:
- constituent component adding means for adding selected one of two components,
- first monitoring means upstream of said adding means for monitoring changes in the etchant composition and activating said adding means upon monitoring etchant deficiency of a constituent component thereof,
- and second monitoring means downstream of said adding means responsive to said first monitoring means for initiating and maintaining the selective addition by said adding means of alternate ones of said constituent components into the etchant until an improvement in the etchant quality is monitored by said second monitoring means and said first monitoring means maintains the adding means in the addition mode until the etchant quality falls between present parameters,
- said second monitoring means comprises second light sensing means for sensing the intensity of light rays passing through a sample of the etchant downstream of the constituent component adding means,
- and second meter relay means responsive to said second light sensing means for maintaining said adding means in the constituent component addition mode until a curing component is added to the etchant,
- said second meter relay means is responsive to a predetermined time delay during said component addition mode in which no change in light intensity is sensed to discontinue the addition of the selected constituent component and initiate the addition of another constituent component, the addition of said other constituent component continuing until the light intensity sensed by said first monitoring means falls within the predetermined intensity parameters.
Dependencies are inferred from the claim text.