Controlled gap surface acoustic wave device
AssigneeHughes Aircraft Company
InventorOberdan W. Otto
Life of this patent
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Abstract
A surface acoustic wave device for use as an amplifier or convolver, or the like, and incorporating a plurality of parallel, spaced rails disposed between and separating a semiconductor slab and a surface acoustic wave propagating planar surface of a piezoelectric substrate a relatively small but finite distance apart, the rails having longitudinal axes aligned with the propagation beam path by and between a pair of spaced electro-acoustic transducers disposed on the substrate.
Claims9
A surface acoustic wave device incorporating a controlled gap and adaptable for use as a convolver, amplifier, and the like, comprising:
- a substrate of piezoelectric material having a polished upper surface capable of propagating surface acoustic wave energy;
- transducer means including a pair of spaced electro-acoustic transducers disposed on said substrate for defining a propagation beam path between said transducers;
- a semiconductor slab having a lower polished planar surface and an upper planar surface at least partially in contact with a conductive electrode;
- support means including a plurality of parallel, spaced elongated rails disposed on said propagation beam path between said transducers and having longitudinal axes aligned with said propagation beam path for separating said upper and lower planar surfaces a predetermined distance to couple surface acoustic wave energy propagating in said beam path to said slab;
- and
- pressure means coupled to said slab and to said substrate for exerting a uniform compressional force thereto forcing said planar surfaces toward each other while contact therebetween being prevented by said rails.
Dependencies are inferred from the claim text.