Method of producing a tantalum thin film capacitor
AssigneeSiemens Aktiengesellschaft
InventorWilfried Anders
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Abstract
A method of producing thin film tantalum capacitors having a tantalum thin film electrode mounted on a nonconducting support member is described. The tantalum electrode is doped with nitrogen to produce a nitrogen content in a range from the nitrogen content of .beta. tantalum to that for tantalum nitride. A tantalum pentoxide film with dielectric properties is grown on the tantlum electrode by oxidation. At least, the tantalum electrode and the dielectric are subjected to tempering. The dielectric is then covered with another electrode.
Claims4
A method for producing heat-stable, dip-solderable thin film tantalum capacitors comprising the steps of:
- mounting a thin film alpha tantalum electrode on a non-conducting supporting member, the tantalum being doped with nitrogen so as to have a minimum nitrogen content greater than the nitrogen content of beta tantalum and a maximum nitrogen content less than that of tantalum nitride,
- forming a tantalum pentoxide film having dielectric properties on said tantalum electrode,
- tempering at least the tantalum electrode and the dielectric film and
- covering said dielectric film with another electrode of a film conducting material.
Dependencies are inferred from the claim text.