Article handling device
AssigneeInternational Business Machines Corporation
InventorBernd Cruse
Life of this patent
Estimating the term…
Loading patent…
AssigneeInternational Business Machines Corporation
InventorBernd Cruse
Estimating the term…
A pin is integral with a diaphragm and extends from one side of the diaphragm. The other side of the diaphragm is subjected to a pressure or vacuum to create a pressure differential across the diaphragm to move the pin into or out of engagement with an article within a controlled environment. The diaphragm isolates a fluid, which produces the pressure differential across the diaphragm, from the controlled environment. In one embodiment, the pin is formed at the center of the diaphragm and moves only in a straight line. In another embodiment, the pin is formed eccentric to the center of the diaphragm so as to have a combination movement of angular and straight. The pin can be employed to stop an article such as a semiconductor wafer, for example, or to raise or to lower the wafer without the actuating fluid contaminating the controlled environment in which the semiconductor wafer is disposed.
A device for engaging an article movable in a controlled environment including:
A device for engaging an article in a controlled environment including:
A device for engaging an article movable in a controlled environment including:
Dependencies are inferred from the claim text.