Diaphragm arrangement for pressure transducers
AssigneeKistler Instrumente AG
InventorsHans Conrad Sonderegger, Hans Ulrich Baumgartner
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Abstract
A diaphragm arrangement is provided for pressure measuring transducer devices wherein the diaphragm includes a structure of the flexible portions thereof permitting stable calibration and compensation of environmental conditions during measurements. In particular, the diaphragm structure includes concentric annular grooves at opposite surfaces of the diaphragm to form at least one annular rim having elastic tubular walls normal to the diaphragm surfaces, thereby providing the flexible portion of the diaphragm. The connection of the diaphragm to the transducer structure is apart from this flexible construction, and the construction can be varied to suit the conditions of usage.
Claims28
Diaphragm arrangement for pressure transducers comprising
- a diaphragm plate having first and second parallel major surfaces,
- a plurality of annular concentric first grooves formed within said diaphragm plate at said first major surface to a depth less than the thickness of the plate,
- at least one second annular groove formed within said diaphragm plate at said second major surface to a depth less than the thickness of said plate, said second annular groove being formed concentrically between at least two of said first grooves in said first surface with two concentric annular elastic walls being formed between said first and second grooves, and
- an annular rim connecting said two annular elastic walls at the end thereof which is substantially coplanar with said first major surface.
In a pressure transducer system comprising a housing having walls, a transducing element mounted within said housing, a force transmission member mounted within said housing at an annular separation from said walls for transmitting forces to said transducing element, and a diaphragm mounted on an end of said housing in contact with said force transmission member for imparting pressure values of a pressure medium to said force transmission member, the improvement comprising said diaphragm including
- a diaphragm plate having first and second parallel major surfaces, said first major surface facing said pressure medium and said second major surface contacting surfaces of said housing walls and said force transmission member respectively,
- a plurality of annular concentric first grooves formed within said diaphragm plate in said first major surface to a depth less than the thickness of the plate,
- at least one second annular groove formed within said diaphragm plate in said second major surface to a depth less than the thickness of said plate, said second annular groove being formed concentrically with at least two of said first grooves in said first surface with two concentric annular elastic walls being formed between said first and second grooves, and
- an annular rim connecting said two annular elastic walls, said annular rim having an end surface which is coplanar with said first major surface.
A pressure transducer including a force measuring element inserted in a tubular housing having a force transmitting surface coplanar with an end surface of the housing and a plate-shaped diaphragm covering an annular gap between the housing and the force measuring element, said diaphragm being in contact flush with the end face of the housing and the force transmitting surface for the force measuring element, characterized in that the diaphragm has, in the zone of the annular gap, at least one coaxial annular groove open toward the annular gap, said groove extending between two concentric annular grooves at the other side of the diaphragm, wherein walls formed between the mutually concentric grooves are formed in the shape of coaxial cylinders.
Dependencies are inferred from the claim text.