Measuring with microscope
AssigneeVickers Instruments, Inc.
InventorJames Whittome
Life of this patent
Estimating the term…
Abstract
A measurement module projects into a microscope a fiduciary image having a visually extensive area. Measurements are made by translating the fiduciary relative to the object between two positions in which different fiduciary image boundaries are tangent to respective object image sides, as determined by null positions in which neither dark overlap nor bright separation zones appear between the two semi-transparent images. The width of the object can be determined from the distance of relative movement of the fiduciary between these positions. In preferred form the fiduciary image has first and second boundaries in fixed relation at a predetermined spacing and the measurement is corrected by the spacing between the two fiduciary boundaries.
Claims10
An inspection or measurement microscope including means for producing and projecting a fiduciary image of fixed form onto the field of view of the microscope concurrently with means for projecting the image of an object to be measured and a calibrated mechanism adapted to translate the fiduciary image relative to the object image along a straight line to effect measurement of said object, said means for producing said fiduciary image adapted to produce said fiduciary image in the form of first and second pre-defined fixed boundaries each demarcating visually appreciable areas of relatively light and dark value, said boundaries being movable relative to the object image in the direction of said straight line and the sequence of light and dark areas at one of the boundaries being the reverse of the sequence at the other boundary, said calibrated mechanism enabling said fiduciary image to be relatively translated to determine between each said fiduciary boundary and a respective boundary of the image of said object a visually determinable null position when the boundary of said fiduciary image exactly coincides with the boundary of said object image as determined visually by the relative brightness of areas at said boundaries, said apparatus enabling measurement of the width of said object by determination of the position of said calibrated mechanism at said null positions thereby avoiding the need to split a beam into two object images and to move said images relatively.
Dependencies are inferred from the claim text.