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AssigneeKulite Semiconductor Products, Inc.
InventorsAnthony D. Kurtz, Joseph R. Mallon, Amnon Brosh
Estimating the term…
A beam type transducer of the type activated by a push rod, which rod is secured to a thin silicon diaphragm including a shallow deflection area determining depression. The rod is secured to the silicon diaphragm within the depression and is surrounded by a glass plate. The glass plate has a central accommodating aperture for insertion of the rod therethrough and has a spherical depression ground on a surface and of a diameter relatively equal to the diameter of the depression in said silicon. The glass plate is bonded about its periphery to cover the silicon diaphragm with the spherical depression facing the depression in the silicon. The rod is bonded to the silicon and directed through the aperture in the glass. Immediately below the aperture in the glass and encircling the rod is a cylindrical member which acts as a negative over pressure stop. The other end of the rod is coupled to a beam for application of a force thereto. The structure described operates to limit the forces applied to the transducer in a positive direction and in a negative direction. The magnitude of desired forces are limited by causing the silicon diaphragm to impinge upon the spherical glass surface. For negative forces, the cylindrical member impinges against the bottom surface of the glass plate to thus limit these undesired forces.
In a beam type transducer of the type employing a deflectable beam having at least one force responsive element positioned on a surface thereof, a rod having one end coupled to said beam and said other end coupled to a semiconductor diaphragm member, said diaphragm having a central depression with a glass sheet covering said depression and having a central aperture through which said rod as coupled to said diaphragm is directed, said rod capable of transmitting a force applied to said diaphragm to said beam in a positive direction, the improvement therewith of apparatus for stopping said rod for forces applied in a direction opposite to said positive forces, comprising means coupled to said rod and located beneath said aperture to coact with said glass sheet and hence, limit the motion of said rod for said opposite direction forces.
In combination:
In a transducer of the type employing a semiconductor diaphragm member having a relatively central depression defining an active area, with a glass sheet covering said depression to act as a stop for said diaphragm for large desired direction forces applied to said diaphragm causing said semiconductor member to impinge upon said glass sheet, the improvement in combination therewith comprising a spherical depression located on the surface of said glass sheet facing said central depression and relatively of the same diameter to define said active region, said spherical depression being furthest from said semiconductor at a central region thereof and closest at a peripheral region whereby large forces applied to the peripheral region of said active area cause said semiconductor diaphragm to impinge upon said glass more rapidly than forces centrally applied.
In a transducer of the type employing a diaphragm member capable of deflection upon application of a force applied thereto, the improvement in combination therewith comprising a glass sheet covering said diaphragm, said glass sheet having a spherical depression located on a surface thereof and of a diameter to determine an active deflection area for said diaphragm, said spherical depression serving to limit large forces applied to the peripheral region of said diaphragm, which forces cause said diaphragm to impinge upon said glass to limit the deflection of said diaphragm.
Dependencies are inferred from the claim text.