Device for the programmed tracing of designs by particle bombardment
AssigneeThomson-CSF
InventorJacques Trotel
Life of this patent
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Abstract
The present invention relates to a device designed to automatically trace designs at a very small scale. The device comprises an electron-optical system forming an elementary image of extremely small dimensions, of a diaphragm. A scanning system makes it possible to display said image, line by line over the surface which is to be printed, in a first direction, while a mechanical system displaces the surface in a direction perpendicular to the first direction. The arrangement is controlled by a logic system supplying code numbers which indicate the programme to be followed in respect of each line. The invention applies to microelectronics.
Claims6
An automatic device for forming programmed patterns upon a substrate, comprising an electron optical system, for forming an electron beam, means for deflecting said beam, a control electrode for controlling its intensity by all or nothing fashion, a data processing system for controlling said deflecting means and said control electrode, said device comprising upon the beam trajectory, a diaphragm in order to delimit the beam trajectory, and a lens for projecting onto the substrate a very small scale image of said diaphragm, said deflection means making it possible to displace said image, in order to scan said substrate line by line parallel to a first direction Ox, motor displacing means, actuated by said data processing system, for scanning the substrate line by line, by displacement of the substrate in a second direction Oy, perpendicularly to the first, by all or nothing control of the beam causing said pattern to be formed line by line by the succession of exposed and unexposed areas.
Dependencies are inferred from the claim text.