Ultra-violet micrographic objective

An economically manufacturable optical system of relatively large effective aperture for efficiently transmitting rays in the ultra-violet portion of the spectrum having substantially the following specifications:

• TABLE 1 ______________________________________ EFL = 1.3039 inches (33.11 mm) Half Angle of Field = 12.55.degree. Thickness Spacing Lens Radii(in.) (in.) (in.) N.sub.D V ______________________________________ L.sub.1 R.sub.1 = 2.3320 1.697 55.4 R.sub.2 = -9.9876 D.sub.1 = .1709 S.sub.1 = .005 L.sub.2 R.sub.3 = 1.5523 1.697 55.4 R.sub.4 = -3.2894 D.sub.2 = .1657 S.sub.2 = .005 L.sub.3 R.sub. 5 = 1.0150 1.697 55.4 R.sub.6 = -1.4557 D.sub.3 = .1541 S.sub.3 = .2064 L.sub.4 R.sub.7 = 2.0378 1.646 34.1 R.sub.8 = -0.5897 D.sub.4 = .0720 S.sub.4 = .1212 STOP - - - - - - - - - - - - S.sub.5 = .1436 L.sub.5 R.sub.9 = 1.2414 1.650 39.2 R.sub.10 = -0.6660 D.sub.5 = .2529 L.sub.6 R.sub.11 = 0.6660 1.697 55.4 R.sub.12 = 1.8960 D.sub.6 = .2534 S.sub.6 = .006 L.sub.7 R.sub.13 = 1.0624 1.651 55.9 R.sub.14 = -10.9941 D.sub.7 = .2452 S.sub.7 = .005 L.sub.8 R.sub.15 = 1.2749 1.651 55.9 R.sub.16 = 4.6676 D.sub.8 = .7357 S.sub.8 = .2085 L.sub.9 R.sub. 17 = -0.6787 1.498 67.1 R.sub.18 = Inf. D.sub.9 = .0600 S.sub.9 = .0051 BFL ______________________________________
• wherein the first column lists the lens elements numerically starting at the ray entrance side of the system;
• the second column lists the respective base radii R.sub.1 to R.sub.18 ;
• the third column lists the thicknesses of the respective elements;
• the fourth column lists the axial spacings S.sub.1 to S.sub.9 between respective elements;
• and the fourth and fifth columns list respectively the refractive index and the dispersive index of the optical material.