Ultra-violet micrographic objective

An economically manufacturable optical system of relatively large effective aperture for efficiently transmitting rays in the ultra-violet portion of the spectrum, the optical system having substantially the following specifications:

• ______________________________________ EFL = 1.1751 inches (29.85 mm) Half Angle of Field = 12.15.degree. spacing Lens Radii(in.) Thickness(in.) (in.) N.sub.D V ______________________________________ L.sub.1 R.sub.1 = 1.7850 D.sub.1 = .1400 1.691 54.7 R.sub.2 = -1.1450 S.sub.1 = .6410 L.sub.2 R.sub.3 = 1.4440 D.sub.2 = .3200 1.691 54.7 R.sub.4 = 7.2120 S.sub.2 = .0050 L.sub.3 R.sub.5 = 1.0360 D.sub.3 = .1970 1.691 54.7 R.sub.6 = -1.9500 S.sub.3 = .2890 L.sub.4 R.sub.7 = -30.0003 D.sub.4 =.0700 1.689 31.2 R.sub.8 = -.6300 S.sub.4 = .1760 -- STOP -- S.sub.5 = .1380 L.sub.5 R.sub.9 = 120.0480 D.sub.5 = .0700 1.717 29.5 R.sub.10 = -1.1450 S.sub.6 = 0 L.sub.6 R.sub.11 = 1.1450 D.sub.6 = .1400 1.734 51.7 R.sub.12 = 15.0900 S.sub.7 =.0050 L.sub.7 R.sub.13 = 1.1210 D.sub.7 = .3150 1.691 54.7 R.sub.14 = 27.1732 S.sub.8 = .0050 L.sub.8 R.sub.15 = 1.2920 D.sub.8 = .4990 1.691 54.7 R.sub.16 = 2.6603 S.sub.9 = .3240 L.sub.9 R.sub.17 = -0.6160 D.sub.9 = .0550 S.sub.10 = .0094 1.498 67.1 R.sub.18 = Inf. (BFL to FILM PLANE) ______________________________________
• wherein the first column lists the lens elements numerically starting at the ray entrance side of the system;
• the second column lists the respective base radii R.sub.1 to R.sub.18 ;
• the third column lists the thicknesses of the respective elements;
• the fourth column lists the axial spacings S.sub.1 to S.sub.10 between respective elements;
• and the fourth and fifth columns list respectively the refractive index and the dispersive index of the optical material.