Back to results
US 4,050,048 AGranted
Humidity sensor, material therefor and method
AssigneePlessey Incorporated
InventorLawrence E. Frazee
Life of this patent
Estimating the term…
Abstract
A novel humidity sensor printed and fired on a dielectric substrate comprising an interdigitated pattern of a conductive precious metal with cobalt oxide as the only binder. Sensors according to the invention may be employed as hermeticity detectors in semiconductor packages.
Claims10
A humidity sensor comprising:
- a ceramic substrate;
- a fired-on pattern of a hygroscopic material in the form of a pair of closely-spaced electrodes;
- said material comprising a major proportion of a conductive precious metal and a minor proportion of cobalt oxide;
- and
- means for connecting said electrodes into a circuit.
2 more elements
A package for semiconductive devices comprising:
- a hermetically-sealable cavity including a ceramic substrate forming the floor of said cavity;
- a metallized lead pattern fired onto said substrate and adapted for electrical connection of a semiconductor device within said cavity to conductive leads external to said cavity;
- a humidity sensor fired onto said substrate in the form of a pair of closely-spaced electrodes, said sensor comprising a mixture of a precious metal and cobalt oxide;
- and
- additional metallized leads adapted for connection of said electrodes into a circuit.
2 more elements
Dependencies are inferred from the claim text.