Electrodepositing method
AssigneeSony Corporation
InventorsShin-Ichi Tokumoto, Eiji Tanaka, Kenji Ogisu, Tadao Fujita
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Abstract
An electrodeposition method of electrodepositing a material with a flat and smooth surface, in which an electrolytic condition such as a speed of movement of a cathode relative to an electrolyte, an electrolytic current density, a duty ratio of an interrupted electrolytic current or an interruption frequency of an electrolytic current is changed periodically from a normal value to another value and back again.
Claims4
In the method of electrodepositing titanium onto a cathode immersed in a fused salt bath electrolyte by passing an electrolyzing current between an anode also immersed in said electrolyte and said cathode while intermittently interrupting said electrolyzing current and effecting relative movement between said cathode and said electrolyte;
- and in which the speed of said relative movement, the density of said electrolyzing current, the frequency at which said electrolyzing current is intermittently interrupted and the duty ratio of the periods during which said electrolyzing current is passed and interrupted, respectively, are parameters affecting the electrodeposition of the titanium on said cathode;
- the improvement of rotating said cathode so as to effect said relative movement, and substantially changing at least said speed of relative movement periodically in a repeating cycle between a first value and a substantially different second value throughout the time during which titanium is being electrodeposited on the cathode.
Dependencies are inferred from the claim text.