Apparatus for producing compact polycrystalline InP and GaP ingots
AssigneeSiemens Aktiengesellschaft
InventorKlaus Zeuch
Life of this patent
Estimating the term…
Abstract
An apparatus for producing compact polycrystalline ingots of materials such as InP, GaP and GaAs having a defined geometric form is provided comprising a reaction boat having a plurality of melting pots formed therein, said melting pots having the shape of a single crystal melting crucible and at least one connecting canal communicating with said melting pots.
Claims6
An apparatus for use in producing compact polycrystalline InP, GaP and GaAs ingots of defined geometric form comprising an elongated reaction boat having a plurality of melting pots, each of the shape of a single crystal melting crucible in which said ingots are to be further processed, formed therein, said plurality of melting pots arranged in a line and, a canal between each two adjacent melting pots extending over essentially the full height thereof, whereby said melting pots can be filled with indium or gallium, the reaction boat disposed in zone melting apparatus, heated in a narrow zone in an atmosphere staurated with phosphorous or arsenic and the zone moved from one end to the other to form ingots in succession with free indium or gallium migrating to the other end and available for reuse.
Dependencies are inferred from the claim text.