Apparatus for exposing a photosensitive beltlike material
AssigneeDainippon Screen Seizo Kabushiki Kaisha
InventorsOsamu Tanabe, Hisao Nishizawa, Kazuo Hata
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Abstract
Apparatus for exposing an image of a desired pattern, such as a lead frame pattern for producing lead frames of IC devices, with a predetermined pitch on a photosensitive beltlike material consisting of a film carrier and a photoresist-coated metallic foil laminated on the carrier. Apparatus typically comprises a first means for positively supporting and accurately positioning the beltlike material at an exposing position, a second means for intermittently conveying the material and a third means for photoelectrically detecting the amount of the movement of the beltlike material to control the first and the second means.
Claims5
Apparatus for exposing an image onto a photosensitive beltlike material, said apparatus comprising:
- a light source to illuminate an original pattern block,
- an optical system to cast and focus an image of said pattern block,
- exposure control means to control the focusing and the exposing of said optical system,
- conveying means to intermittently convey said beltlike material onto the focal plane of said optical system,
- detecting means, being subject to a lateral movement of said beltlike material, to detect its amount of movement, thereby controlling said conveying means,
- supporting means to support and position said beltlike material at said focal plane,
- first rotating member having both said beltlike material and a beltlike protecting means wound therearound in advance,
- a second rotating member,
- a third rotating member having another beltlike protecting means wound therearound in advance, and
- a fourth rotating member;
- said fourth rotating member being adapted to receive said beltlike protecting means wound off from the first member, and said second rotating member being adapted to receive both said beltlike material from the first member and another beltlike protecting means from the third member.
Apparatus for exposing an image onto a photosensitive beltlike material, said apparatus comprising:
- a light source to illuminate an original pattern block,
- an optical system to cast and focus an image of said pattern block,
- exposure control means to control the focusing and the exposing of said optical system,
- conveying means to intermittently convey said beltlike material onto the focal plane of said optical system,
- detecting means, being subject to a lateral movement of said beltlike material, to detect its amount of movement, thereby controlling said conveying means, and
- supporting means to support and position said beltlike material at said focal plane,
- said detecting means substantially comprising a roller having a plurality of pawls on its periphery, a disc coaxial with said roller and having along its periphery a plurality of apertures in a corresponding relationship to said pawls, and photoelectrical elements disposed on both sides of said disc;
- said pawls being adapted to engage with the perforations of the beltlike material so that both said roller and the disc follow the movement of the beltlike material, and said photoelectrical elements being adapted to be intermittently actuated through said apertures of the disc so as to generate output pulses for controlling said electric actuator of the conveying means.
Dependencies are inferred from the claim text.