Device for discharging static electricity
OwnerHermann Brenneckeinventor
Life of this patent
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Abstract
A device to discharge substrates loaded with static electricity by means of an electric glow discharge generated between isolated high voltage electrodes and exposed needle electrodes connected to a grounded collector bar is characterized by the fact that the high voltage electrodes are formed as concentric closed rings conductively connected to each other and disposed in spaced coaxial relationship with the needle electrodes. The grounded collector bar is formed as a hollow chamber into which compressed air may be introduced and directed into the space between the ring electrodes and the needle electrodes associated therewith to perform a cleaning operation and aid in directing ions toward the substrate to be discharged.
Claims15
A device for discharging static electricity by means of an electric glow discharge comprising
- a plurality of needle electrodes,
- first means for supporting said needle electrodes in spaced parallel relationship,
- a plurality of conductivity interconnected ring electrodes,
- second means for supporting said ring electrodes so that each ring electrode is positioned in coaxial surrounding relationship to a respective needle electrode, and
- means for effecting high voltage connection to said ring electrodes.
Dependencies are inferred from the claim text.