Apparatus for doping a semiconductor crystalline rod
AssigneeSiemens Aktiengesellschaft
InventorsJoachim Martin, Ernst Haas, Manfred Schnoeller
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Abstract
An apparatus for doping a semiconductor crystalline rod by nuclear or radiogenic reactions comprised of a hollow irradiation housing having axially and rotatably movable rod support means within the chamber thereof and a neutron conductive sleeve connected with the housing and providing communication between a neutron source and the housing chamber. Accurate and controlled doping of a semiconductor crystalline rod mounted on the rod support means within the housing chamber occurs via controlled rod movement in relation to the neutron source.
Claims35
An apparatus for predetermined and reproducible doping of a crystalline semiconductor rod by the formation of dopant atoms via radiogenic radiation initiated by irradiating such rod comprising:
- a housing having end and side walls joined together to define a hollow irradiation chamber therein;
- an axially and rotatably movable rod support means mounted on an end wall of said housing and extending into said chamber for supporting a semiconductor rod;
- a drive means operationally coupled with said rod support means for effecting controlled axial and rotational movement of said support means;
- a radiation source positioned outside said housing for producing a radiation field capable of initiating radiogenic reactions in a semiconductor rod;
- and
- a connection means mounted on a side wall of said housing for providing communication between said chamber and said radiation field.
Dependencies are inferred from the claim text.